{"product_id":"3d-and-circuit-integration-of-masayoshi-esashi-9783527346479","title":"3D and Circuit Integration of Mems","description":"Dieses Referenzwerk ist eine umfassende und systematische EinfÃ1\/4hrung in die Technologien fÃ1\/4r das Packaging und die heterogene Integration von Mikrosystemen. Der Schwerpunkt liegt auf MEMS aus Silikon, die in großem Umfang zum Einsatz kommen, und auf Technologien zur Systemintegration. Die Themenbereiche umfassen u. a. Bulk-Mikromechanik, Oberflächen-Mikromechanik, CMOS-MEMS, Wafer-Verbindungen, Waferbonden und Wafer-Sealing.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Masayoshi Esashi\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 3527346473\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9783527346479\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Wiley-Vch\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 07\/19\/2021\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 528\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 2.25lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.61h x 6.69w x 1.13d\u003cbr\u003e\u003cp\u003e\u003cb\u003eAbout the Author\u003c\/b\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp\u003e\u003ci\u003e\u003cb\u003eMasayoshi Esashi\u003c\/b\u003e is senior research fellow in the Micro System Integration Center at Tohoku University and Professor emeritus. He obtained his doctorate from Tohoku University and his research focuses on MEMS, integrated sensors, and MEMS packaging. He has published over 500 scientific papers and was the recipient of the IEEE Jun-ichi Nishizawa Medal in 2016.\u003c\/i\u003e\u003c\/p\u003e","brand":"Masayoshi Esashi","offers":[{"title":"Hardcover","offer_id":43943407157503,"sku":"9783527346479","price":185.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/products\/img_ad4c2a68-0d57-4239-9dc5-407503c31c8d.jpg?v=1681497944","url":"https:\/\/www.whiterainbookhouse.com\/products\/3d-and-circuit-integration-of-masayoshi-esashi-9783527346479","provider":"WR Book House","version":"1.0","type":"link"}