{"product_id":"advanced-lithography-burton-kohler-9781632380166","title":"Advanced Lithography","description":"This book presents state-of-the-art information regarding the extensive field of advanced lithography. Advanced lithography expands into numerous sub-fields like micro electro-mechanical system (MEMS), nano-lithography, nano-physics, etc. In optimized electron device, nano-lithography reaches up to 20 nm in size. Subsequently, we have to analyze and develop true single nanometer size lithography. One of the solutions is to analyze a fusion of bottom up and top down technologies like EB drawing and self-assembly with block copolymer. In nano-photonics and MEMS, 3D structures are required for carrying out specific functions in the devices for applications. They are formed as a result of execution of numerous techniques like stereo-lithography, sputtering, colloid lithography, deposition, dry etching, etc. This book provides the readers with valuable information about nano structure, 3D structure, nano-lithography, and elucidates the methodology, techniques and applications of nano-lithography.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Burton Kohler\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 1632380161\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781632380166\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e NY Research Press\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 02\/09\/2015\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 260\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.14lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.00h x 6.00w x 0.63d","brand":"Burton Kohler","offers":[{"title":"Hardcover","offer_id":48449816396031,"sku":"9781632380166","price":125.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_b56928a2-a7b3-42b5-911f-6ed8f9358251.jpg?v=1777265030","url":"https:\/\/www.whiterainbookhouse.com\/products\/advanced-lithography-burton-kohler-9781632380166","provider":"WR Book House","version":"1.0","type":"link"}