{"product_id":"advances-in-chemical-mechanical-planarization-suryadevara-babu-9780128217917","title":"Advances in Chemical Mechanical Planarization (Cmp)","description":"\u003cp\u003e\u003ci\u003eAdvances in Chemical Mechanical Planarization (CMP), Second Edition\u003c\/i\u003e provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP cleaning challenges and tribology of CMP.\u003c\/p\u003e \u003cp\u003eThis important book offers a systematic review of fundamentals and advances in the area. Part one covers CMP of dielectric and metal films, with chapters focusing on the use of current and emerging techniques and processes and on CMP of various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. New content addressed includes CMP challenges with tungsten, cobalt, and ruthenium as interconnect and barrier films, consumables for ultralow topography and CMP for memory devices. Part two addresses consumables and process control for improved CMP and includes chapters on CMP pads, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes and approaches for defection characterization, mitigation, and reduction. \u003c\/p\u003e\u003ci\u003e \u003c\/i\u003e\u003cp\u003eAdvances in Chemical Mechanical Planarization (CMP), Second Edition is an invaluable resource and key reference for materials scientists and engineers in academia and R\u0026amp;D. \u003c\/p\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Babu Suryadevara\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 012821791X\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780128217917\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Woodhead Publishing\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 09\/16\/2021\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 648\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.89lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.00h x 6.00w x 1.31d","brand":"Babu Suryadevara","offers":[{"title":"Paperback","offer_id":43982630453503,"sku":"9780128217917","price":285.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_ecb3dc9e-01ea-4de8-ac1f-b709ec63a323.jpg?v=1683262218","url":"https:\/\/www.whiterainbookhouse.com\/products\/advances-in-chemical-mechanical-planarization-suryadevara-babu-9780128217917","provider":"WR Book House","version":"1.0","type":"link"}