{"product_id":"advancing-silicon-carbide-electronics-technology-konstantinos-zekentes-9781644900666","title":"Advancing Silicon Carbide Electronics Technology II: Core Technologies of Silicon Carbide Device Processing","description":"\u003cp\u003eThe book presents an in-depth review and analysis of Silicon Carbide device processing. The main topics are: (1) Silicon Carbide Discovery, Properties and Technology, (2) Processing and Application of Dielectrics in Silicon Carbide Devices, (3) Doping by Ion Implantation, (4) Plasma Etching and (5) Fabrication of Silicon Carbide Nanostructures and Related Devices. The book is also suited as supplementary textbook for graduate courses.\u003c\/p\u003e\u003cp\u003eKeywords: Silicon Carbide, SiC, Technology, Processing, Semiconductor Devices, Material Properties, Polytypism, Thermal Oxidation, Post Oxidation Annealing, Surface Passivation, Dielectric Deposition, Field Effect Mobility, Ion Implantation, Post Implantation Annealing, Channeling, Surface Roughness, Dry Etching, Plasma Etching, Ion Etching, Sputtering, Chemical Etching, Plasma Chemistry, Micromasking, Microtrenching, Nanocrystal, Nanowire, Nanotube, Nanopillar, Nanoelectromechanical Systems (NEMS).\u003c\/p\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Konstantinos Zekentes\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 1644900661\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781644900666\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Materials Research Forum LLC\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 03\/15\/2020\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 294\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 0.87lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.00h x 6.00w x 0.62d","brand":"Konstantinos Zekentes","offers":[{"title":"Paperback","offer_id":43983266775295,"sku":"9781644900666","price":125.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_62bdea75-9fae-43f5-8635-999e270ea28b.jpg?v=1683265626","url":"https:\/\/www.whiterainbookhouse.com\/products\/advancing-silicon-carbide-electronics-technology-konstantinos-zekentes-9781644900666","provider":"WR Book House","version":"1.0","type":"link"}