{"product_id":"atomic-layer-deposition-2e-tommi-kriinen-9781118062777","title":"Atomic Layer Deposition 2e","description":"Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Tommi K蒿ri臺nen, David Cameron, Marja-Leena K蒿ri臺nen\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 1118062779\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781118062777\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Wiley-Scrivener\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 05\/28\/2013\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 272\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.25lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.30h x 6.10w x 0.90d","brand":"Tommi K蒿ri臺nen","offers":[{"title":"Hardcover","offer_id":43924120305919,"sku":"9781118062777","price":226.95,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/products\/img_4433b6ad-06e9-4ab5-87d0-6869156769bb.jpg?v=1681068597","url":"https:\/\/www.whiterainbookhouse.com\/products\/atomic-layer-deposition-2e-tommi-kriinen-9781118062777","provider":"WR Book House","version":"1.0","type":"link"}