{"product_id":"atomic-layer-deposition-for-semiconductors-cheol-seong-hwang-9781461480532","title":"Atomic Layer Deposition for Semiconductors","description":"Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Cheol Seong Hwang\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 1461480531\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781461480532\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Springer\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 10\/19\/2013\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 263\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.15lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.38h x 6.43w x 0.79d","brand":"Cheol Seong Hwang","offers":[{"title":"Hardcover","offer_id":43936029475071,"sku":"9781461480532","price":179.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/products\/img_882f8cc5-abc3-4bcd-b904-2e062568a3f7.jpg?v=1681423202","url":"https:\/\/www.whiterainbookhouse.com\/products\/atomic-layer-deposition-for-semiconductors-cheol-seong-hwang-9781461480532","provider":"WR Book House","version":"1.0","type":"link"}