{"product_id":"atomic-layer-deposition-for-semiconductors-cheol-seong-hwang-9781489979438","title":"Atomic Layer Deposition for Semiconductors","description":"Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Cheol Seong Hwang\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 1489979433\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781489979438\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Springer\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 08\/23\/2016\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 263\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 0.86lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.21h x 6.14w x 0.58d","brand":"Cheol Seong Hwang","offers":[{"title":"Paperback","offer_id":44124023292159,"sku":"9781489979438","price":179.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_290444e7-d999-45fd-a6b7-268ce9851bc0.jpg?v=1687434286","url":"https:\/\/www.whiterainbookhouse.com\/products\/atomic-layer-deposition-for-semiconductors-cheol-seong-hwang-9781489979438","provider":"WR Book House","version":"1.0","type":"link"}