{"product_id":"capacitive-silicon-resonators-nguyen-van-toan-9780367217761","title":"Capacitive Silicon Resonators: Performance Enhancement Methods","description":"\u003cp\u003eMicrofabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eFeatures\u003c\/strong\u003e\u003c\/p\u003e\u003cul\u003e \u003cli\u003eIntroduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators\u003c\/li\u003e \u003cli\u003eProvides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator.\u003c\/li\u003e \u003cli\u003eDiscusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor.\u003c\/li\u003e \u003cli\u003eFocusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. \u003c\/li\u003e \u003cli\u003eReviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.\u003c\/li\u003e \u003c\/ul\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Nguyen Van Toan,Takahito Ono\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 0367217767\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780367217761\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e CRC Press\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 06\/24\/2019\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 162\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 0.90lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.40h x 6.10w x 0.60d","brand":"Nguyen Van Toan","offers":[{"title":"Hardcover","offer_id":48447714427135,"sku":"9780367217761","price":165.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_62538726-2fc3-4679-bbc9-597eb45147c8.jpg?v=1777234312","url":"https:\/\/www.whiterainbookhouse.com\/products\/capacitive-silicon-resonators-nguyen-van-toan-9780367217761","provider":"WR Book House","version":"1.0","type":"link"}