{"product_id":"cmos-gate-stack-scaling-materials-alexander-a-demkov-9781605111285","title":"CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications","description":"To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k\/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Alexander A. Demkov\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 1605111287\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781605111285\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Cambridge University Press\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 11\/19\/2009\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 194\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 0.85lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.20h x 6.10w x 0.60d","brand":"Alexander A. Demkov","offers":[{"title":"Hardcover","offer_id":48436875165951,"sku":"9781605111285","price":119.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_dfbfa15b-f545-43ce-9ee4-753336f1a342.jpg?v=1777158358","url":"https:\/\/www.whiterainbookhouse.com\/products\/cmos-gate-stack-scaling-materials-alexander-a-demkov-9781605111285","provider":"WR Book House","version":"1.0","type":"link"}