{"product_id":"computational-modeling-in-semiconductor-processing-m-meyyappan-9780890067079","title":"Computational Modeling in Semiconductor Processing","description":"This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e M. Meyyappan\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 0890067074\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780890067079\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Artech House Publishers\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 01\/01\/1995\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 363\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.45lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.32h x 6.25w x 0.97d","brand":"M. Meyyappan","offers":[{"title":"Hardcover","offer_id":48447812305151,"sku":"9780890067079","price":44.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_c8afa99d-41e9-45ef-be04-51b52affa2dc.jpg?v=1777234984","url":"https:\/\/www.whiterainbookhouse.com\/products\/computational-modeling-in-semiconductor-processing-m-meyyappan-9780890067079","provider":"WR Book House","version":"1.0","type":"link"}