{"product_id":"germanium-surface-preparation-methods-jungyup-kim-9783836484114","title":"Germanium Surface Preparation Methods","description":"Germanium is gaining interest in the semiconductor industry as a replacement channel material for high mobility applications. Con-tamination directly affects the device performance, yield and reliability. Therefore, continued device scaling is dependent on effective surface preparation including effective contamination and particle removal of germanium surface. Cleaning and preparation methods for silicon surface have been extensively developed over the past few decades. Germanium surface cleaning and preparation is at its infancy and is markedly different from that of silicon. This book examines these differences and fundamentals involved in germanium surface cleaning. This book also proposes methods for basic germanium surface cleaning and the basis for further process develop-ment for professionals involved in surface cleaning of semiconductor materials.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Jungyup Kim\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 3836484110\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9783836484114\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e VDM Verlag Dr. Mueller E.K.\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 10\/09\/2008\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 108\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 0.34lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.00h x 6.00w x 0.22d","brand":"Jungyup Kim","offers":[{"title":"Paperback","offer_id":47419625603327,"sku":"9783836484114","price":52.92,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_44338f88-4995-4d81-b5e9-2800ffa9bd04.jpg?v=1761512794","url":"https:\/\/www.whiterainbookhouse.com\/products\/germanium-surface-preparation-methods-jungyup-kim-9783836484114","provider":"WR Book House","version":"1.0","type":"link"}