{"product_id":"handbook-of-silicon-based-mems-markku-tilli-9780323299657","title":"Handbook of Silicon Based Mems Materials and Technologies","description":"\u003ci\u003e \u003c\/i\u003e\u003cp\u003eThe Handbook of Silicon Based MEMS Materials and Technologies, Second Edition,  is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. \u003c\/p\u003e \u003cp\u003eThe book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. \u003c\/p\u003e \u003cp\u003eFurthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. \u003c\/p\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Markku Tilli\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 0323299652\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780323299657\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e William Andrew\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 09\/22\/2015\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 826\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 5.30lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 10.90h x 8.50w x 1.70d","brand":"Markku Tilli","offers":[{"title":"Hardcover","offer_id":48112863215871,"sku":"9780323299657","price":275.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_5517485c-5c14-48f8-a202-8497dfcb5a97.jpg?v=1769611448","url":"https:\/\/www.whiterainbookhouse.com\/products\/handbook-of-silicon-based-mems-markku-tilli-9780323299657","provider":"WR Book House","version":"1.0","type":"link"}