{"product_id":"handbook-of-silicon-semiconductor-metrology-alain-c-diebold-9780367397166","title":"Handbook of Silicon Semiconductor Metrology","description":"\u003cp\u003eContaining more than 300 equations and nearly 500 drawings, photographs, and micrographs, \u003cbr\u003ethis reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Alain C. Diebold\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 0367397161\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780367397166\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e CRC Press\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 10\/17\/2019\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 896\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 4.00lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.90h x 6.80w x 1.60d\u003c\/p\u003e","brand":"Alain C. Diebold","offers":[{"title":"Paperback","offer_id":43988874789119,"sku":"9780367397166","price":82.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_73dc61f0-45e7-42bb-9479-bccdf0054c5b.jpg?v=1683296862","url":"https:\/\/www.whiterainbookhouse.com\/products\/handbook-of-silicon-semiconductor-metrology-alain-c-diebold-9780367397166","provider":"WR Book House","version":"1.0","type":"link"}