{"product_id":"handbook-of-silicon-semiconductor-metrology-alain-c-diebold-9780824705060","title":"Handbook of Silicon Semiconductor Metrology","description":"Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Alain C. Diebold\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 0824705068\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780824705060\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e CRC Press\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 06\/29\/2001\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 894\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 3.73lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 10.12h x 7.26w x 1.83d\u003cbr\u003e\u003cbr\u003e\u003cb\u003eReview Citation(s): \u003c\/b\u003e\u003cbr\u003e\u003ci\u003eScitech Book News\u003c\/i\u003e 09\/01\/2001 pg. 154","brand":"Alain C. Diebold","offers":[{"title":"Hardcover","offer_id":48112763633919,"sku":"9780824705060","price":450.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_d9cf84b1-1a2e-4e3d-8eb7-58b4cf760d2d.jpg?v=1769610766","url":"https:\/\/www.whiterainbookhouse.com\/products\/handbook-of-silicon-semiconductor-metrology-alain-c-diebold-9780824705060","provider":"WR Book House","version":"1.0","type":"link"}