{"product_id":"high-kmetal-gate-devices-for-future-cmos-stephan-abermann-9783836465298","title":"High-k\/Metal-gate Devices for Future CMOS Technology","description":"The present work addresses the investigation of high-? dielectrics and their applicability in CMOS-devices, using metal-gate electrodes. The contents firstly include the deposition of zirconium dioxide and hafnium dioxide from the gas phase, using organometallic precursors, and their physico-chemical characterization. Furthermore, these material systems are investigated regarding their thermodynamical stability. In the following, MOS-capacitors are fabricated by the selective deposition of gate electrodes made from aluminum, molybdenum, nickel, or titanium-nitride, and characterized regarding their electrical behavior. Results within this work demonstrate that well balanced and correctly applied annealing of the devices clearly improves electrical behavior. We attribute these materials high potential to be applied in near-future CMOS-technology.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Stephan Abermann\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 3836465299\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9783836465298\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e VDM Verlag\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 11\/06\/2008\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 180\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 0.55lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.00h x 6.00w x 0.38d","brand":"Stephan Abermann","offers":[{"title":"Paperback","offer_id":48446423335167,"sku":"9783836465298","price":73.44,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_03d90a31-9e53-4740-8f2f-6a3f97a87144.jpg?v=1777224530","url":"https:\/\/www.whiterainbookhouse.com\/products\/high-kmetal-gate-devices-for-future-cmos-stephan-abermann-9783836465298","provider":"WR Book House","version":"1.0","type":"link"}