{"product_id":"lithography-michael-wang-9789533070643","title":"Lithography","description":"Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Michael Wang\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 9533070641\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9789533070643\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Intechopen\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 02\/01\/2010\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 680\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 2.80lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.61h x 6.69w x 1.44d","brand":"Michael Wang","offers":[{"title":"Hardcover","offer_id":48137018343679,"sku":"9789533070643","price":205.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_703f9f39-5f7b-499b-a311-16444dd2deae.jpg?v=1770165997","url":"https:\/\/www.whiterainbookhouse.com\/products\/lithography-michael-wang-9789533070643","provider":"WR Book House","version":"1.0","type":"link"}