{"product_id":"metal-impurities-in-silicon-device-fabrication-klaus-graff-9783540642138","title":"Metal Impurities in Silicon-Device Fabrication","description":"This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Klaus Graff\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 3540642137\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9783540642138\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Springer\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 02\/18\/2000\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 270\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.15lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.50h x 6.39w x 0.61d","brand":"Klaus Graff","offers":[{"title":"Hardcover","offer_id":46292977156351,"sku":"9783540642138","price":109.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_18a098c5-93f6-4c44-998b-42746f5ad1ef.jpg?v=1730210725","url":"https:\/\/www.whiterainbookhouse.com\/products\/metal-impurities-in-silicon-device-fabrication-klaus-graff-9783540642138","provider":"WR Book House","version":"1.0","type":"link"}