{"product_id":"micro-and-nano-fabrication-hans-h-gatzen-9783662508268","title":"Micro and Nano Fabrication: Tools and Processes","description":"\u003cp\u003eIntroduction-MEMS, a Historical Perspective.- Vacuum Technology.- Deposition Technologies.- Etching Technologies.- Doping and Surface Modification.- Lithography.- LIGA.- Nanofabrication by Self-Assembly.- Enabling Technologies I - Wafer Planarization and Bonding.- Enabling Technologies II - Contamination Control.- Device Fabrication - An Example.\u003c\/p\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Hans H. Gatzen, Volker Saile, J?g Leuthold\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 3662508265\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9783662508268\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Springer\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 10\/06\/2016\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 519\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.67lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.21h x 6.14w x 1.11d","brand":"Hans H. Gatzen","offers":[{"title":"Paperback","offer_id":44073681256703,"sku":"9783662508268","price":99.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_bb942c22-f649-4da0-a3c2-d5bc87292fc3.jpg?v=1685449277","url":"https:\/\/www.whiterainbookhouse.com\/products\/micro-and-nano-fabrication-hans-h-gatzen-9783662508268","provider":"WR Book House","version":"1.0","type":"link"}