{"product_id":"micro-electronic-and-mechanical-systems-kenichi-takahata-9789533070278","title":"Micro Electronic and Mechanical Systems","description":"This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Kenichi Takahata\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 9533070277\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9789533070278\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Intechopen\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 12\/01\/2009\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 528\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 2.28lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.61h x 6.69w x 1.13d","brand":"Kenichi Takahata","offers":[{"title":"Hardcover","offer_id":47136566673663,"sku":"9789533070278","price":205.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_558cbd8a-bfcb-4281-b697-7c7d61b20809.jpg?v=1755023737","url":"https:\/\/www.whiterainbookhouse.com\/products\/micro-electronic-and-mechanical-systems-kenichi-takahata-9789533070278","provider":"WR Book House","version":"1.0","type":"link"}