{"product_id":"microlithography-bruce-w-smith-9781439876756","title":"Microlithography: Science and Technology","description":"\u003cp\u003eThe completely revised Third Edition to the bestselling \u003ci\u003eMicrolithography: Science and Technology\u003c\/i\u003e provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world's leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved.\u003c\/p\u003e\u003cp\u003eNew in the Third Edition\u003c\/p\u003e\u003cp\u003eIn addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New advances in lithography modeling are covered as well as fully updated information detailing the new technologies, systems, materials, and processes for optical UV, DUV, immersion, and EUV lithography.\u003c\/p\u003e\u003cp\u003eThe Third Edition of \u003ci\u003eMicrolithography: Science and Technology\u003c\/i\u003e authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition.\u003c\/p\u003e\u003cp\u003eLoaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.\u003c\/p\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Bruce W. Smith\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 1439876754\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781439876756\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e CRC Press\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 05\/20\/2020\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 838\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 2.95lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 10.08h x 7.09w x 1.65d","brand":"Bruce W. Smith","offers":[{"title":"Hardcover","offer_id":48088277844223,"sku":"9781439876756","price":220.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_2636ecba-f078-4578-9e17-5174c09d569e.jpg?v=1769104017","url":"https:\/\/www.whiterainbookhouse.com\/products\/microlithography-bruce-w-smith-9781439876756","provider":"WR Book House","version":"1.0","type":"link"}