{"product_id":"plasma-etching-m-sugawara-9780198562870","title":"Plasma Etching: Fundamentals and Applications","description":"This book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical theory, plasma physics, and plasma diagnostics, before proceeding to the details of the etching process.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e M. Sugawara\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 019856287X\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780198562870\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Oxford University Press, USA\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 07\/30\/1998\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 356\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.50lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.21h x 6.14w x 0.81d","brand":"M. Sugawara","offers":[{"title":"Hardcover","offer_id":44054673817855,"sku":"9780198562870","price":245.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_2390d833-e135-4e7f-b388-8b83035fb218.jpg?v=1685031321","url":"https:\/\/www.whiterainbookhouse.com\/products\/plasma-etching-m-sugawara-9780198562870","provider":"WR Book House","version":"1.0","type":"link"}