{"product_id":"principles-of-chemical-vapor-deposition-d-m-dobkin-9781402012488","title":"Principles of Chemical Vapor Deposition","description":"\u003cp\u003eDo you work with chemical Vapor deposition processes or reactors? Have you ever wondered what goes on inside the chamber or how the deposition processes work? If the answer to this is yes, then \u003cstrong\u003ePrinciples of Chemical Vapor Deposition\u003c\/strong\u003e is for you! \u003c\/p\u003e \u003cp\u003e\u003cstrong\u003ePrinciples of Chemical Vapor Deposition\u003c\/strong\u003e provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment. \u003c\/p\u003e \u003cp\u003eThis book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.\u003c\/p\u003e \u003cp\u003eThis book will be invaluable to process engineers, graduate students and researchers newly involved in the development of processes and hardware for chemical vapor deposition. In addition, the book is appropriate for senior level undergraduates or graduate courses on chemical vapor deposition as well as semiconductor manufacturing and coating technologies. \u003c\/p\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e D. M. Dobkin, M. K. Zuraw\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 1402012489\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781402012488\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Springer\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 04\/30\/2003\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 273\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.22lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.41h x 6.48w x 0.91d","brand":"D. M. Dobkin","offers":[{"title":"Hardcover","offer_id":43925418967295,"sku":"9781402012488","price":249.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/products\/img_3f94d854-c340-4d86-a94a-f0558c81ef28.jpg?v=1681077163","url":"https:\/\/www.whiterainbookhouse.com\/products\/principles-of-chemical-vapor-deposition-d-m-dobkin-9781402012488","provider":"WR Book House","version":"1.0","type":"link"}