{"product_id":"rapid-thermal-processing-for-future-h-fukuda-9780444513397","title":"Rapid Thermal Processing for Future Semiconductor Devices","description":"This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices. \u003cp\u003e\u003c\/p\u003eThis book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e H. Fukuda,Fukuda\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 0444513396\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780444513397\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Elsevier Bv\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 04\/02\/2003\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 160\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 0.53lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.21h x 6.14w x 0.35d","brand":"H. Fukuda","offers":[{"title":"Paperback","offer_id":47421804118271,"sku":"9780444513397","price":137.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_e28a5023-75ee-4706-b591-201367136823.jpg?v=1761527201","url":"https:\/\/www.whiterainbookhouse.com\/products\/rapid-thermal-processing-for-future-h-fukuda-9780444513397","provider":"WR Book House","version":"1.0","type":"link"}