{"product_id":"research-on-chemical-mechanical-polishing-jie-cheng-9789811355851","title":"Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect","description":"\u003cp\u003eThis thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO\u003csub\u003e4\u003c\/sub\u003e-based slurry. The thesis subsequently studies Cu\/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research.\u003c\/p\u003e\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Jie Cheng\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 9811355851\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9789811355851\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Springer\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 01\/30\/2019\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 137\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 0.50lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.21h x 6.14w x 0.33d","brand":"Jie Cheng","offers":[{"title":"Paperback","offer_id":44126124310783,"sku":"9789811355851","price":109.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_515451c3-ee59-4f36-a1f7-8e30f41c3e27.jpg?v=1687446409","url":"https:\/\/www.whiterainbookhouse.com\/products\/research-on-chemical-mechanical-polishing-jie-cheng-9789811355851","provider":"WR Book House","version":"1.0","type":"link"}