{"product_id":"run-to-run-control-in-semiconductor-manufacturing-james-moyne-9780849311789","title":"Run-To-Run Control in Semiconductor Manufacturing","description":"Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine \"runs,\" thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e James Moyne\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 0849311780\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780849311789\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e CRC Press\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 11\/30\/2000\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 366\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.36lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.52h x 6.35w x 0.88d\u003cbr\u003e\u003cbr\u003e\u003cb\u003eReview Citation(s): \u003c\/b\u003e\u003cbr\u003e\u003ci\u003eScitech Book News\u003c\/i\u003e 03\/01\/2001 pg. 158","brand":"James Moyne","offers":[{"title":"Hardcover","offer_id":48065210745087,"sku":"9780849311789","price":230.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_f1828ac8-869d-43b8-9dad-cb872bec8ad8.jpg?v=1768673711","url":"https:\/\/www.whiterainbookhouse.com\/products\/run-to-run-control-in-semiconductor-manufacturing-james-moyne-9780849311789","provider":"WR Book House","version":"1.0","type":"link"}