{"product_id":"semiconductor-strain-metrology-terence-k-s-wong-9781608055548","title":"Semiconductor Strain Metrology: Principles and Applications","description":"This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Terence K. S. Wong\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 160805554X\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9781608055548\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Bentham Science Publishers\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 02\/01\/2018\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 144\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Paperback\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.06lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 11.00h x 8.50w x 0.37d","brand":"Terence K. S. Wong","offers":[{"title":"Paperback","offer_id":44126169039103,"sku":"9781608055548","price":107.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/files\/img_a238d1e3-9b87-405c-ade1-02980859974c.jpg?v=1687446652","url":"https:\/\/www.whiterainbookhouse.com\/products\/semiconductor-strain-metrology-terence-k-s-wong-9781608055548","provider":"WR Book House","version":"1.0","type":"link"}