{"product_id":"spectroscopic-ellipsometry-hiroyuki-fujiwara-9780470016084","title":"Spectroscopic Ellipsometry: Principles and Applications","description":"Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Hiroyuki Fujiwara\u003cbr\u003e\u003cb\u003eISBN-10:\u003c\/b\u003e 0470016086\u003cbr\u003e\u003cb\u003eISBN-13:\u003c\/b\u003e 9780470016084\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Wiley\u003cbr\u003e\u003cb\u003eLanguage:\u003c\/b\u003e English\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 03\/12\/2007\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 392\u003cbr\u003e\u003cb\u003eFormat:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.50lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.13h x 6.33w x 1.04d\u003cbr\u003e\u003cbr\u003e\u003cb\u003eReview Citation(s): \u003c\/b\u003e\u003cbr\u003e\u003ci\u003eScitech Book News\u003c\/i\u003e 06\/01\/2007 pg. 35","brand":"Hiroyuki Fujiwara","offers":[{"title":"Hardcover","offer_id":43919845196031,"sku":"9780470016084","price":267.95,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/2982\/9887\/products\/img_914c4790-9180-40ee-8e4e-d3e3b01a6325.jpg?v=1680812216","url":"https:\/\/www.whiterainbookhouse.com\/products\/spectroscopic-ellipsometry-hiroyuki-fujiwara-9780470016084","provider":"WR Book House","version":"1.0","type":"link"}