An Introduction to Microelectromechanical Systems Engineering (Hardcover) (ISBN-13: 9780890065815)

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

Author: Nadim Maluf
ISBN-10: 0890065810
ISBN-13: 9780890065815
Publisher: Artech House Publishers
Language: English
Published: 11/30/1999
Pages: 292
Format: Hardcover
Weight: 1.42lbs
Size: 9.29h x 6.33w x 0.95d