Design a cylinder HDP semiconductor Plasma dry etcher (Paperback) (ISBN-13: 9798561001697)

A special shape of cylinder metal roller is designed for the truly seamless anti-fake product. And it is manufactured by the traditional lithography and electroforming process. However, it is suffered by the complex manufacturing procedure and complicated chemical parameters then the yield rate is not as expected from the original designing concept.In order to overcome the difficulties of the manufacturing procedures, the novel concept of cylinder shape HDP plasma dry etching of metal roller from semiconductor IC process is proposed and applied to a patent.

Author: Kung Linliu
ISBN-13: 9798561001697
Publisher: Independently Published
Language: English
Published: 11/08/2020
Pages: 136
Format: Paperback
Weight: 0.42lbs
Size: 9.00h x 6.00w x 0.29d