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Euv Lithography (Hardcover) (ISBN-13: 9780470471555)
Vendor:
Vivek Bakshi
Product type:
Books
- $146.95
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Description
xEUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
Author: Vivek Bakshi
ISBN-10: 0470471557
ISBN-13: 9780470471555
Publisher: Wiley
Language: English
Published: 12/01/2008
Pages: 702
Format: Hardcover
Weight: 3.43lbs
Size: 10.00h x 7.00w x 1.70d
Author: Vivek Bakshi
ISBN-10: 0470471557
ISBN-13: 9780470471555
Publisher: Wiley
Language: English
Published: 12/01/2008
Pages: 702
Format: Hardcover
Weight: 3.43lbs
Size: 10.00h x 7.00w x 1.70d
By Vivek Bakshi
xVivek Bakshi is the President of EUV Litho, Inc. He was previously a senior member of the technical staff of Sematech, Inc.
Dr. Bakshi studied at the University of Texas at Austin; the University of Idaho; and the Indian Institute of Technology at Kanpur.
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