Fabrication and Design of Resonant Microdevices (Hardcover) (ISBN-13: 9780815515777)

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

Author: Behraad Bahreyni
ISBN-10: 0815515774
ISBN-13: 9780815515777
Publisher: William Andrew
Language: English
Published: 09/03/2008
Pages: 250
Format: Hardcover
Weight: 1.25lbs
Size: 10.00h x 6.90w x 0.80d

Review Citation(s):
Scitech Book News 12/01/2008 pg. 162