Handbook of Silicon Semiconductor Metrology (Paperback) (ISBN-13: 9780367397166)

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,
this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

Author: Alain C. Diebold
ISBN-10: 0367397161
ISBN-13: 9780367397166
Publisher: CRC Press
Language: English
Published: 10/17/2019
Pages: 896
Format: Paperback
Weight: 4.00lbs
Size: 9.90h x 6.80w x 1.60d