Handbook of Silicon Semiconductor Metrology (Hardcover) (ISBN-13: 9780824705060)

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

Author: Alain C. Diebold
ISBN-10: 0824705068
ISBN-13: 9780824705060
Publisher: CRC Press
Language: English
Published: 06/29/2001
Pages: 894
Format: Hardcover
Weight: 3.73lbs
Size: 10.12h x 7.26w x 1.83d

Review Citation(s):
Scitech Book News 09/01/2001 pg. 154