Ion Implantation (Hardcover) (ISBN-13: 9789535106340)

Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.

Author: Mark Goorsky
ISBN-10: 9535106341
ISBN-13: 9789535106340
Publisher: Intechopen
Language: English
Published: 05/30/2012
Pages: 452
Format: Hardcover
Weight: 2.02lbs
Size: 9.61h x 6.69w x 1.00d