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Ion Sources (Paperback) (ISBN-13: 9783642085024)
Vendor:
Huashun Zhang
Product type:
Books
- $249.99
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$249.99
Description
xThis book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.
Author: Huashun Zhang
ISBN-10: 3642085024
ISBN-13: 9783642085024
Publisher: Springer
Language: English
Published: 12/03/2010
Pages: 476
Format: Paperback
Weight: 1.52lbs
Size: 9.21h x 6.14w x 1.00d
Author: Huashun Zhang
ISBN-10: 3642085024
ISBN-13: 9783642085024
Publisher: Springer
Language: English
Published: 12/03/2010
Pages: 476
Format: Paperback
Weight: 1.52lbs
Size: 9.21h x 6.14w x 1.00d
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