Ion Sources (Hardcover) (ISBN-13: 9783540657477)

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.

Author: Jianrong Zhang, Huashun Zhang
ISBN-10: 3540657479
ISBN-13: 9783540657477
Publisher: Springer
Language: English
Published: 11/08/1999
Pages: 476
Format: Hardcover
Weight: 1.92lbs
Size: 9.21h x 6.14w x 1.06d