Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics (Paperback) (ISBN-13: 9780128202555)

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.

Author: Fuccio Cristiano
ISBN-10: 0128202556
ISBN-13: 9780128202555
Publisher: Woodhead Publishing
Language: English
Published: 04/23/2021
Pages: 426
Format: Paperback
Weight: 1.25lbs
Size: 9.00h x 6.00w x 0.87d