Low Dielectric Constant Materials for IC Applications (Hardcover) (ISBN-13: 9783540678199)

Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.

Author: Paul S. Ho
ISBN-10: 3540678190
ISBN-13: 9783540678199
Publisher: Springer
Language: English
Published: 11/14/2002
Pages: 310
Format: Hardcover
Weight: 1.31lbs
Size: 9.68h x 6.40w x 0.70d