Low Dielectric Constant Materials for IC Applications (Paperback) (ISBN-13: 9783642632211)

Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.

Author: Paul S. Ho
ISBN-10: 3642632211
ISBN-13: 9783642632211
Publisher: Springer
Language: English
Published: 10/04/2012
Pages: 310
Format: Paperback
Weight: 1.03lbs
Size: 9.21h x 6.14w x 0.69d