Low Energy Ion Assisted Film Growth (Hardcover) (ISBN-13: 9781860943515)

This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book.

Author: Agustin Gonzalez-Elipe,Jose M. Sanz,Francisco Yubero
ISBN-10: 1860943519
ISBN-13: 9781860943515
Publisher: Imperial College Press
Language: English
Published: 03/25/2003
Pages: 300
Format: Hardcover
Weight: 1.20lbs
Size: 9.10h x 6.20w x 0.90d