MEMS and NEMS: Systems, Devices, and Structures (Hardcover) (ISBN-13: 9780849312625)

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience. Focusing on the basic theory needed to design, develop, analyze, and prototype high-performance devices, components, and structures, it shows how to analyze processes, phenomena, and properties at nano- and micro-scales and illustrates development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

Author: Sergey Edward Lyshevski
ISBN-10: 0849312620
ISBN-13: 9780849312625
Publisher: CRC Press
Language: English
Published: 01/18/2002
Pages: 461
Format: Hardcover
Weight: 1.86lbs
Size: 9.60h x 6.40w x 1.35d