MEMS Mechanical Sensors (Hardcover) (ISBN-13: 9781580535366)

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

Author: Stephen Beeby
ISBN-10: 1580535364
ISBN-13: 9781580535366
Publisher: Artech House Publishers
Language: English
Published: 04/30/2004
Pages: 269
Format: Hardcover
Weight: 1.42lbs
Size: 10.38h x 7.26w x 0.77d