Metal Impurities in Silicon-Device Fabrication (Hardcover) (ISBN-13: 9783540642138)

This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.

Author: Klaus Graff
ISBN-10: 3540642137
ISBN-13: 9783540642138
Publisher: Springer
Language: English
Published: 02/18/2000
Pages: 270
Format: Hardcover
Weight: 1.15lbs
Size: 9.50h x 6.39w x 0.61d