Micro Electronic and Mechanical Systems by Takahata, Kenichi

Micro Electronic and Mechanical Systems (Hardcover) (ISBN-13: 9789533070278)

Vendor: Kenichi Takahata
Product type: Books
Format: Hardcover
$205.00
$205.00
$205.00
Subtotal: $205.00
Micro Electronic and Mechanical Systems by Takahata, Kenichi

Micro Electronic and Mechanical Systems

$205.00
Micro Electronic and Mechanical Systems by Takahata, Kenichi

Micro Electronic and Mechanical Systems

$205.00
Format: Hardcover
Description
Description
x
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

Author: Kenichi Takahata
ISBN-10: 9533070277
ISBN-13: 9789533070278
Publisher: Intechopen
Language: English
Published: 12/01/2009
Pages: 528
Format: Hardcover
Weight: 2.28lbs
Size: 9.61h x 6.69w x 1.13d

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