Microengineering, MEMS, and Interfacing: A Practical Guide (Paperback) (ISBN-13: 9780367391027)

Designed to address particular problems across a range of disciplines, Microengineering, MEMS, and Interfacing: A Practical Guide provides a general overview of micromachining techniques and presents micromachining approaches to problem solving. The author outlines techniques for micromachining materials, including silicon, metals, and polymers, and then illustrates how to combine these technologies to create a variety of structures and devices. He also includes discussions on nanotechnology and how it overlaps with microengineering, introduces the subject of sensor interfacing, and raises the tricky subject of MEMS packaging.

Author: Danny Banks
ISBN-10: 0367391023
ISBN-13: 9780367391027
Publisher: CRC Press
Language: English
Published: 09/05/2019
Pages: 352
Format: Paperback
Weight: 1.45lbs
Size: 8.90h x 5.90w x 0.80d