Post-Processing Techniques for Integrated MEMS (Hardcover) (ISBN-13: 9781580539012)

The reduction of size in mechanical systems results in a dramatic decrease of power consumption and cost, while greatly improving performance and reliability. For this reason MEMS (microelectromechanical systems) has become of great interest to electrical engineers working in a wide range of application areas, from DNA analysis and medical applications, to digital projection displays and imaging, This cutting-edge book focuses on a the critical process of integrating MEMS with standard pre-processed electronics. It provides engineers, working in a variety of fields, with an innovative process and specific techniques for effectively achieving this integration and taking advantage of the many performance benefits of using MEMS technology in their systems.

Author: Sherif Sedky
ISBN-10: 1580539017
ISBN-13: 9781580539012
Publisher: Artech House Publishers
Language: English
Published: 12/07/2005
Pages: 207
Format: Hardcover
Weight: 1.24lbs
Size: 9.36h x 6.32w x 0.68d