Run-To-Run Control in Semiconductor Manufacturing (Hardcover) (ISBN-13: 9780849311789)

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

Author: James Moyne
ISBN-10: 0849311780
ISBN-13: 9780849311789
Publisher: CRC Press
Language: English
Published: 11/30/2000
Pages: 366
Format: Hardcover
Weight: 1.36lbs
Size: 9.52h x 6.35w x 0.88d

Review Citation(s):
Scitech Book News 03/01/2001 pg. 158