Semiconductor Strain Metrology: Principles and Applications (Paperback) (ISBN-13: 9781608055548)

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.

Author: Terence K. S. Wong
ISBN-10: 160805554X
ISBN-13: 9781608055548
Publisher: Bentham Science Publishers
Language: English
Published: 02/01/2018
Pages: 144
Format: Paperback
Weight: 1.06lbs
Size: 11.00h x 8.50w x 0.37d