Spectroscopic Ellipsometry: Principles and Applications by Fujiwara, Hiroyuki

Spectroscopic Ellipsometry: Principles and Applications (Hardcover) (ISBN-13: 9780470016084)

Vendor: Hiroyuki Fujiwara
Product type: Books
Format: Hardcover
$267.95
$267.95
$267.95
Subtotal: $267.95
Spectroscopic Ellipsometry: Principles and Applications by Fujiwara, Hiroyuki

Spectroscopic Ellipsometry: Principles and Applications

$267.95
Spectroscopic Ellipsometry: Principles and Applications by Fujiwara, Hiroyuki

Spectroscopic Ellipsometry: Principles and Applications

$267.95
Format: Hardcover
Description
Description
x
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Author: Hiroyuki Fujiwara
ISBN-10: 0470016086
ISBN-13: 9780470016084
Publisher: Wiley
Language: English
Published: 03/12/2007
Pages: 392
Format: Hardcover
Weight: 1.50lbs
Size: 9.13h x 6.33w x 1.04d

Review Citation(s):
Scitech Book News 06/01/2007 pg. 35
By Hiroyuki Fujiwara
By Hiroyuki Fujiwara
x
Dr Hiroyuki Fujiwara is based at the National Institute of Advanced Industrial Science and Technology, Ibaraki, Japan. He received his PhD at the Tokyo Institute of Technology in 1996 and carried out post-doctoral research with Professor R.W. Collins at Penn State University. From 1998 to present he has been working as a senior research scientist at the Research Center for Photovoltaics at NIAIST. He received the 'Most Promising Young Scientist Award' from the Japan Society of Applied Physics and the 'Young Researcher Award' at the World Conference on Photovoltaic Energy Conversion in 2003.

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