Spectroscopic Techniques for Semiconductor Industry (Hardcover) (ISBN-13: 9789811257599)

The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing.Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers.Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas.

Author: Vladimir Protopopov
ISBN-10: 9811257590
ISBN-13: 9789811257599
Publisher: World Scientific Publishing Company
Language: English
Published: 12/27/2022
Pages: 324
Format: Hardcover
Weight: 2.30lbs
Size: 11.00h x 8.50w x 0.75d